SEMI PV88 - Test Method for Determination of Hydrogen in Photovoltaic (PV) Polysilicon by Inert Gas Fusion Infrared Absorption Method -

Abstract

The purpose of this Test Method is to standardize analytical protocols for the determination of hydrogen content in photovoltaic (PV) polysilicon which may affect the safety of casting process for polycrystalline silicon ingot and the quality of polysilicon ingot relating to the subsequent properties and performances of PV solar products. This will facilitate comparison of test results among worldwide laboratories used for monitoring or qualifying PV polysilicon and other PV silicon materials.

This Test Method can be used to analyze hydrogen content in polysilicon for PV applications, involving all types of PV polysilicon; for example, granular polycrystalline silicon produced by fluidized bed process or PV polysilicon wafers and slugs, etc.

Based on the same matrix and instruments, the test method may also be used for determining hydrogen content in other silicon materials covering PV monosilicon, semiconductor monosilicon and semiconductor polysilicon, silicon raw materials including metal silicon and silicon powder, etc.

This Test Method is for use with commercially available hydrogen analyzers which are based on the inert gas fusion principle and use infrared detector as the measuring technique.

Referenced SEMI Standards (purchase separately)
SEMI PV17 — Specification for Virgin Silicon Feedstock Materials for Photovoltaic Applications
SEMI PV22 — Specification for Silicon Wafers for Use in Photovoltaic Solar Cells
SEMI PV43 — Test Method for the Measurement of Oxygen Concentration in PV Silicon Materials for Silicon Solar Cells by Inert Gas Fusion Infrared Detection Method

Revision History
SEMI PV88-1018 (Reapproved 0124)
SEMI PV88-1018 (first published)

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