SEMI PV97 - Specification for Silicon Powder Used in Polysilicon Production -

Abstract

Silicon powder is an important raw material for the production of polysilicon, it is used for the synthesis of trichlorosilane and hydrosilylation of silicon tetrachloride. The quality of silicon powder has direct influence on the quality of trichlorosilane.

With the improvement of polysilicon production technology, the quality of polysilicon products is getting higher and higher, and the requirements on the quality of silicon powder are also getting higher and higher.

This Specification is to guide polysilicon manufacturers to obtain higher quality raw materials.

This Specification specifies the classification and test methods of silicon powders for polysilicon production.

Referenced SEMI Standards (purchase separately)

SEMI PV59 — Test Method for Determination of Total Carbon Content in Silicon Powder by Infrared Absorption After Combustion in an Induction Furnace

SEMI PV64 — Test method for Determining B, P, Fe, Al, Ca Contents in Silicon Powder for PV Applications by Inductively Coupled Plasma Optical Emission Spectrometry

Revision History

SEMI PV97-1220 (first published)

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