SEMI PV102 - Guide for Tube PECVD Graphite Boat Materials for Solar Cell Production -

Abstract

1  Purpose
1.1  This Standard develops material guidelines for tube plasma enhanced chemical vapor deposition (PECVD) graphite boats, providing guidance and material performance testing for material manufacturers, processing manufacturers, and battery cell manufacturers. The high reliability of graphite boats is the goal to meet the needs of tubular PECVD process.
2  Scope
2.1  This Standard provides recommendations for various property values and testing methods for graphite and ceramic materials of tube PECVD graphite boats in the photovoltaic field.
2.2  This Standard is applicable to the selection of graphite and ceramic materials involved in the photovoltaic tube PECVD graphite boat.

Referenced SEMI Standards (purchase separately)
None.

Revision History
SEMI PV102-0125 (first published)

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