SEMI S2 - 半導體製造設備安全衛生及環保基準
半導體製造設備安全衛生及環保基準 目的 本安全基準意在建立一套以功能性為基礎的半導體製造設備的環保、健康及安全基準考量
This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006. Originally published in 1991; previously published March 2003.
E This standard was editorially modified in September 2006 to move the "NOTE" notice from the end of the document to the beginning of the document.
This safety guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.
Referenced SEMI Standards
SEMI E6 — Facilities Interface Specifications Guideline and Format
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures
SEMI F15 — Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas