SEMI S2 - 반도체 제조장비에 대한 환경안전보건 가이드라인 -

Abstract

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any language, the English version is the official and authoritative version.
주의: 본 한글본은 참고용으로, 영문원본과 한글본간에 차이가 발생할 경우, 영문원본을 우선으로 해야합니다. 본 한글본에 대한 문의사항이 있는 경우 krstandards@semi.org.로 문의바랍니다.

1  목적(Purpose)
1.1  본 안전 가이드라인의 목적은 반도체 제조 장비에 대한 성능을 기반으로 한(performance-based) 일단의 EHS(환경, 보건 및 안전) 고려사항을 제공하는 것이다.
2  적용 범위(Scope)
2.1  적용가능성(Applicability) — 본 안전 가이드라인은 반도체 제품을 제조, 측정, 조립 및 시험하는 데 사용되는 장비에 적용된다.
2.2  섹션별 요구사항의 우선 순위(Precedence of Sectional Requirements) — 본 안전 가이드라인의 내용 간에 충돌이 있는 경우 기술 문제를 구체적으로 다루는 섹션 또는 하위 섹션이 보다 일반적인 섹션 또는 하위 섹션보다 우선한다.

Referenced SEMI Standards (purchase separately)
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI E76 — Guide for 300 mm Process Equipment Points of Connection to Facility Services
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S3 — Safety Guideline for Process Liquid Heating Systems
SEMI S6 — Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S18 — Environmental, Health, and Safety Guideline for Flammable Silicon Compounds
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
SEMI S30 — Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes

 

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