SEMI S2 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment -

Abstract

* This Safety Guideline has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version.

1 Purpose

1.1 This Safety Guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.

2 Scope

2.1 Applicability — This Safety Guideline applies to equipment used to manufacture, measure, assemble, and test semiconductor products.

2.2 Precedence of Sectional Requirements — In the case of conflict between provisions in different sections of this Safety Guideline, the section or subsection specifically addressing the technical issue takes precedence over the more general section or subsection.

NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Referenced SEMI Standards (purchase separately)

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

SEMI E76 — Guide for 300 mm Process Equipment Points of Connection to Facility Services

SEMI F5 — Guide for Gaseous Effluent Handling

SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S3 — Safety Guideline for Process Liquid Heating Systems

SEMI S6 — Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

SEMI S7 — Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications

SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

SEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination

SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

SEMI S18 — Environmental, Health, and Safety Guideline for Flammable Silicon Compounds

SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

SEMI S30 — Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes

Revision History

SEMI S2-0724E (editorial revision)

SEMI S2-0724 (technical revision)

SEMI S2-0821Ec (delayed revision)

SEMI S2-0821Eb (delayed revision)

SEMI S2-0821Ea (delayed revision)

SEMI S2-0821 (technical revision)

SEMI S2-0818Eb (delayed revision)

SEMI S2-0818Ea (delayed revision)

SEMI S2-0818E (editorial revision)

SEMI S2-0818 (technical revision)

SEMI S2-1016b (delayed revision)

SEMI S2-1016a (delayed revision)

SEMI S2-1016 (technical revision)

SEMI S2-0715a (delayed revision)

SEMI S2-0715 (technical revision)

SEMI S2-0712d (delayed revision)

SEMI S2-0712c (delayed revision)

SEMI S2-0712b (delayed revision)

SEMI S2-0712a (delayed revision)

SEMI S2-0712 (technical revision)

SEMI S2-0310e (delayed revision)

SEMI S2-0310d (delayed revision)

SEMI S2-0310c (delayed revision)

SEMI S2-0310b (delayed revision)

SEMI S2-0310a (delayed revision)

SEMI S2-0310 (technical revision)

SEMI S2-0709 (technical revision)

SEMI S2-0706e (delayed revision)

SEMI S2-0706d (delayed revision)

SEMI S2-0706c (delayed revision)

SEMI S2-0706b (delayed revision)

SEMI S2-0706a (delayed revision)

SEMI S2-0706E (editorial revision)

SEMI S2-0706 (technical revision)

SEMI S2-0703aE (editorial revision)

SEMI S2-0703a (delayed revision)

SEMI S2-0703 (technical revision)

SEMI S2-0303 (technical revision)

SEMI S2-1102 (technical revision)

SEMI S2-0302 (technical revision)

SEMI S2-0200E (editorial revision)

SEMI S2-0200 (complete rewrite)

SEMI S2-93A (technical revision)

SEMI S2-93 (technical revision)

SEMI S2-91 (first published)

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