SEMI S2 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment -

Abstract

* This Safety Guideline has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version.

1  Purpose
1.1  This Safety Guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.
2  Scope
2.1  Applicability — This Safety Guideline applies to equipment used to manufacture, measure, assemble, and test semiconductor products.
2.2  Precedence of Sectional Requirements — In the case of conflict between provisions in different sections of this Safety Guideline, the section or subsection specifically addressing the technical issue takes precedence over the more general section or subsection.

Referenced SEMI Standards (purchase separately)
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI E76 — Guide for 300 mm Process Equipment Points of Connection to Facility Services
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S3 — Safety Guideline for Process Liquid Heating Systems
SEMI S6 — Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S18 — Environmental, Health, and Safety Guideline for Flammable Silicon Compounds
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
SEMI S30 — Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes

Revision History
SEMI S2-0724 (technical revision)
SEMI S2-0821Ec (delayed revision)
SEMI S2-0821Eb (delayed revision)
SEMI S2-0821Ea (delayed revision)
SEMI S2-0821 (technical revision)
SEMI S2-0818Eb (delayed revision)
SEMI S2-0818Ea (delayed revision)
SEMI S2-0818E (editorial revision)
SEMI S2-0818 (technical revision)
SEMI S2-1016b (delayed revision)
SEMI S2-1016a (delayed revision)
SEMI S2-1016 (technical revision)
SEMI S2-0715a (delayed revision)
SEMI S2-0715 (technical revision)
SEMI S2-0712d (delayed revision)
SEMI S2-0712c (delayed revision)
SEMI S2-0712b (delayed revision)
SEMI S2-0712a (delayed revision)
SEMI S2-0712 (technical revision)
SEMI S2-0310e (delayed revision)
SEMI S2-0310d (delayed revision)
SEMI S2-0310c (delayed revision)
SEMI S2-0310b (delayed revision)
SEMI S2-0310a (delayed revision)
SEMI S2-0310 (technical revision)
SEMI S2-0709 (technical revision)
SEMI S2-0706e (delayed revision)
SEMI S2-0706d (delayed revision)
SEMI S2-0706c (delayed revision)
SEMI S2-0706b (delayed revision)
SEMI S2-0706a (delayed revision)
SEMI S2-0706E (editorial revision)
SEMI S2-0706 (technical revision)
SEMI S2-0703aE (editorial revision)
SEMI S2-0703a (delayed revision)
SEMI S2-0703 (technical revision)
SEMI S2-0303 (technical revision)
SEMI S2-1102 (technical revision)
SEMI S2-0302 (technical revision)
SEMI S2-0200E (editorial revision)
SEMI S2-0200 (complete rewrite)
SEMI S2-93A (technical revision)
SEMI S2-93 (technical revision)
SEMI S2-91 (first published)
 

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