SEMI S4 - Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets
Volume(s): Safety Guidelines
Type: Single Standards Download (.pdf)
This safety guideline provides the method for determining which types of gas (in cylinders) should be maintained in separate gas cabinets and which types may be combined with other types. The guideline is designed to be used by those working or doing research in semiconductor-related technology, but the application is not limited to this field. The guideline also recommends a classification scheme which is consistent with that given by Federal OSHA in 29 CFR 1910.1200.
Referenced SEMI Standards
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