SEMI S5 - 氣體鋼瓶限流裝置尺寸估量及鑑定之安全基準
氣體鋼瓶限流裝置尺寸估量及鑑定之安全基準 目的 此安全基準提供決定氣體鋼瓶限流裝置尺寸及鑑定方法，在運輸、儲存、使用時限制有害氣體由鋼瓶釋放的速率
This standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 11, 2003. It was available at www.semi.org in June 2003. Originally published in 1993.
NOTICE: This document was completely rewritten in 2003.
The purpose of this safety guideline is to provide a method to size and identify flow limiting devices that limit the rate of release of hazardous gases from the gas cylinder valve during transportation, storage, and use.
Referenced SEMI Standards
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment