S00500 - SEMI S5 - 氣體鋼瓶限流裝置尺寸估量及鑑定之安全基準

SEMI S5 - 氣體鋼瓶限流裝置尺寸估量及鑑定之安全基準 -

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Volume(s): Safety Guidelines
Language: Chinese (Traditional
Type: Single Standards Download (.pdf)
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Revision: SEMI S5-0616 - Superseded

Revision

Abstract

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.

注意：這個翻譯是一個參考版本。如果您在使用上，發現中文翻譯版本與英文原文版本產生任何差異或是不確定之處，請務必參考英文原文版本，並以英文原文版本為主，英文原文版本屬於正式和權威的版本。

此安全基準提供決定氣體鋼瓶限流裝置(FLDs)尺寸及鑑定方法，在運輸、儲存、使用時限制有害氣體由鋼瓶釋放的速率。

範圍

此安全基準適用於有害氣體鋼瓶FLDs。這些裝置被設計來限制出口端閥門及其下游的氣體不受控制的釋放流率。

此安全基準適用於FLDs上游與其下游的壓力比率產生的至少的臨界流率。

此安全基準提供了一種方法可以確認FLDs的尺寸。

此安全基準提供幾種氣體及它們的混合物通過FLDs時最大和最小流速大約數值的計算方法。

此安全基準針對使用氣體和所需要的流量提供選用FLDs尺寸的方法。

Referenced SEMI Standards

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

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