SEMI S5 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases
This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 16, 2009. Initially available at www.semi.org in February 2010. Originally published in 1993; previously published July 2003.
NOTICE: This document was completely rewritten in 2009.
The purpose of this safety guideline is to provide information and methods related to flow limiting devices that limit the rate of release of hazardous gases from gas cylinder valves during transportation, storage, and use.
Referenced SEMI Standards
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S26 — Environmental, Health, and Safety Guideline for FPD Manufacturing System