SEMI S6 - 半導體製造設備排氣通風基準
半導體製造設備排氣通風基準 目的 本安全基準係在提供半導體製造設備（Semiconductor Manufacturing Equipment ，SME）之排氣通風安全性能標準，以及評估此類標準的測試方法。 在現今強調能源效益及實體限制的趨勢下，使用者設施中排氣通風設備的最佳化越顯重要。採用高效益設計的排氣通風設施可防止人員、財產及環境之健康與安全受到傷害。本安全基準之目的係在提供排氣通風的效能、設計原理、測試方法及標準.
This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. It was available at www.semi.org in June 2007 and on CD-ROM in July 2007. Originally published in 1993.
NOTICE: This document was completely rewritten in 2007.
This safety guideline provides safety performance criteria for exhaust ventilation of semiconductor manufacturing equipment (SME) and test methods for assessing conformance to those criteria. The optimization of exhaust ventilation is becoming more important as energy efficiency and the physical constraints of exhaust ventilation utilities in user facilities become more pronounced. Efficiently designed exhaust ventilation should be provided to protect personnel, property, and the environment from health and safety risks. The purpose of this safety guideline is to provide performance and design principles and test methods and criteria for exhaust ventilation.
Referenced SEMI Standards
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI S2 — Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation of Semiconductor Manufacturing Equipment
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment