SEMI S7 - 半導體製造設備的安全衛生及環保評估報告之安全基準

Volume(s): Safety Guidelines
Language: Chinese (Traditional
Type: Single Standards Download (.pdf)
Abstract

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.

注意:這個翻譯是一個參考版本。如果您在使用上,發現中文翻譯版本與英文原文版本產生任何差異或是不確定之處,請務必參考英文原文版本,並以英文原文版本為主,英文原文版本屬於正式和權威的版本。

本安全基準的目的是讓報告使用者,決定評估公司和評估人員的資格。

在應用「SEMI S系列」文件進行評估有關公司時,本安全基準提供評估公司和評估人員應提供之最低限度的資訊。

在應用「SEMI S系列」文件或因應評估報告買方要求時,本安全基準提供相關資訊應如何予以溝通之。

適用範圍

應用「SEMI S系列」文件於評估公司和評估人員的資格,本基準提供了指導原則。

本基準包括:

· 目的

· 範圍

· 限制

· 引用的標準與文件

· 術語

· 概述

· 評估公司資格

· 評估人員資格

· 專業領域

Referenced SEMI Standards

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S3 — Safety Guidelines for Process Liquid Heating Systems
SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation of Semiconductor Manufacturing Equipment
SEMI S22 — Safety Guideline for Electrical Design of Semiconductor Manufacturing Equipment
SEMI S23 — Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment
SEMI S26 — Environmental, Health, and Safety Guideline for FPD Manufacturing System

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