SEMI S8 - Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment -

Abstract

This Safety Guideline provides ergonomic design principles and considerations for semiconductor manufacturing equipment. It also promotes compatibility between the user and equipment in the manufacturing environment. By using this Safety Guideline, equipment suppliers and users can collaborate and design equipment that will minimize fatigue and injury by fitting the equipment to the expected body size, strength, and range of motion characteristics of the user. SEMI S8 provides equipment effectiveness, along with worker safety, convenience, and comfort when operating equipment.

These Safety Guidelines provide ergonomics design principles and considerations for semiconductor manufacturing equipment.

The purpose of these Safety Guidelines is to promote compatibility between the user and the equipment in the manufacturing environment. The following general principles are integral to the ergonomics design and evaluation of equipment:

The equipment should be designed to optimize safety by distributing tasks. Tasks should be distributed among hardware, software, and users to make the best use of their respective capabilities and to minimize limitations and hazards. Appropriate distribution of tasks will also optimize performance.

Equipment should be designed to minimize potential for errors and mishaps, by conforming to users’ expectations.

The equipment design should reduce fatigue and injury by fitting the equipment to the expected body size, strength, and range of motion characteristics of the user population. Such design will also facilitate task performance.

The guidelines address safety aspects of ergonomics engineering in the design of semiconductor manufacturing equipment. It should be noted that in order to ensure comprehensive coverage of potential safety hazards, some guidelines also address general design goals for effective human-machine performance. The guidelines apply to the design, operation, maintenance, and service of semiconductor manufacturing equipment, as well as, to a limited extent, equipment installation.

Referenced SEMI Standards (purchase separately)

SEMI E95 — Specification for Human Interface for Semiconductor Manufacturing Equipment

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

Revision History

SEMI S8-0218 (technical revision

SEMI S8-1116 (technical revision)

SEMI S8-0915 (technical revision)

SEMI S8-0715 (technical revision)

SEMI S8-0712a (delayed revision)

SEMI S8-0712 (technical revision)

SEMI S8-0308E (editorial revision)

SEMI S8-0308 (technical revision)

SEMI S8-0307E (editorial revision)

SEMI S8-0307 (technical revision)

SEMI S8-0705E (editorial revision)

SEMI S8-0705 (technical revision)

SEMI S8-1103 (technical revision)

SEMI S8-0701 (technical revision)

SEMI S8-1000 (technical revision)

SEMI S8-0600E (editorial revision)

SEMI S8-0600 (technical revision)

SEMI S8-0999 (technical revision)

SEMI S8-95A (technical revision)

SEMI S8-95 (first published)

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