SEMI S9 - Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment that have Been Moved to SEMI S22
This Standard was technically approved by the global Environmental, Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 21, 2010. Available at www.semiviews.org and www.semi.org in February 2011; originally published in 1995; previously published March 2007.
The purpose of this document is to provide a permanent withdrawal notice for SEMI S9 indicating that all technical content has been incorporated within SEMI S22.
Referenced SEMI Standards
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment