SEMI S10 - 風險評估及風險估算過程之安全基準
風險評估及風險估算過程之安全基準 目的 本基準的目是要建立風險評估一般進行原則，以鑑別危害，風險估算和風險評估方法的一致。該文件提供了一個架構進行風險評估，對半導體及同類行業設備，提供預期使用之供應商和購買者作為EHS的參考。 使用這個安全基準，目的是為了幫助對策的發展安排和控制風險
This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007. Originally published December 1996; previously published November 2003.
The purpose of this guideline is to establish general principles for risk assessment to enable identification of hazards, risk estimation and risk evaluation in a consistent and practical manner. The document provides a framework for carrying out risk assessments on equipment in the semiconductor and similar industries and is intended for use by supplier and purchaser as a reference for EHS considerations. Use of this safety guideline is intended to assist in the development of a strategy to prioritize and control risks.
Referenced SEMI Standards
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment