SEMI S10 - Safety Guideline for Risk Assessment and Risk Evaluation Process

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)

This Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at and in August 2015; originally published December 1996; previously published February 2015.


E This Standard was editorially modified in November 2015 to correct a Note reference error. Changes were made to Appendix 1, Table A1-1.


NOTICE: Paragraphs entitled ‘note:’ are not an official part of this Document and are not intended to modify or supersede the official Guideline.


The purpose of this Safety Guideline is to establish general principles for risk assessment to enable identification of hazards, risk estimation and risk evaluation in a consistent and practical manner. The Document provides a framework for carrying out risk assessments on equipment in the semiconductor and similar industries and is intended for use by supplier and purchaser as a reference for EHS considerations.


Use of this Safety Guideline is intended to assist in the development of a strategy to prioritize and control risks.


This Safety Guideline is intended to apply to the assessment of risks considering the lifecycle of the equipment.


This Safety Guideline outlines a hazard identification, risk estimation, and risk evaluation process.


Referenced SEMI Standards

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

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