SEMI S11 - Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments -

Member Price: $138.00
Non-Member Price: $180.00

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI S11-1296 (Withdrawn 1106) - Withdrawn




NOTICE: This Document was balloted and approved for withdrawal in 2006.


These guidelines are intended as a minimum set of performance-based environmental, health, and safety considerations for minienvironments used in semiconductor manufacturing. These guidelines are intended to be a supplement to SEMI S2.


Referenced SEMI Standards (purchase separately)

SEMI S2 — Safety Guidelines for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment

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