SEMI S11 - Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments
This safety guideline was technically approved by the global Environmental, Health, & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 24, 2006. It was available at www.semi.org in October 2006. Originally published in 1996.
NOTICE: This document was balloted and approved for withdrawal in 2006.
These guidelines are intended as a minimum set of performance-based environmental, health, and safety considerations for minienvironments used in semiconductor manufacturing. These guidelines are intended to be a supplement to SEMI S2.
Referenced SEMI Standards
SEMI S2 — Safety Guidelines for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment