SEMI S11 - Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments -
Abstract
NOTICE: This Document was balloted and approved for withdrawal in 2006.
These guidelines are intended as a minimum set of performance-based environmental, health, and safety considerations for minienvironments used in semiconductor manufacturing. These guidelines are intended to be a supplement to SEMI S2.
Referenced SEMI Standards (purchase separately)
SEMI S2 — Safety Guidelines for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment
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S01100 - SEMI S11 - Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments
Sale price$170.00 USD
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