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SEMI S11 - Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments -
Abstract
NOTICE: This Document was balloted and approved for withdrawal in 2006.
These guidelines are intended as a minimum set of performance-based environmental, health, and safety considerations for minienvironments used in semiconductor manufacturing. These guidelines are intended to be a supplement to SEMI S2.
Referenced SEMI Standards (purchase separately)
SEMI S2 — Safety Guidelines for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment
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![S01100 - SEMI S11 - Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments](http://store-us.semi.org/cdn/shop/files/SVolume_356a9bc9-1249-460e-9762-221b099ca4dc.png?v=1693224822&width=2049)
S01100 - SEMI S11 - Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments
Sale price$180.00 USD
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