SEMI S12 - Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination -

Member Price: $130.00
Non-Member Price: $170.00

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI S12-0211E - Current



This Standard was technically approved by the global Environmental, Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 31, 2015. Available at and in November 2015; originally published in 1998; previously published February 2011.

E This Standard was editorially modified in November 2015 to correct a punctuation error. A change was made to the title.


This Document establishes guidance for decontaminating manufacturing equipment (ME) and parts that were or may have been exposed to hazardous materials and which are intended for further productive use. Equipment intended for further productive use includes that being offered for reuse, resale, repair, refurbishment, or relocation.


This Safety Guideline should be adopted at each site with proper consideration given to local, state, national, and international regulations and organization policies.


This Safety Guideline is intended to be used to ensure that decontamination prior to transportation occurs to the greatest extent possible, while acknowledging practical limitations that may exist in individual circumstances. It is recognized that, in many cases, complete chemical decontamination cannot be achieved without destruction of the ME. The ME transferor should ensure that all known remaining potential hazards are clearly identified to the transferee.


This Safety Guideline applies to the decontamination and handling of ME and parts that were or may have been exposed to hazardous materials and may pose a threat to human health or the environment. Handling activities include shutdown, dismantling, removing, labeling, and packaging prior to transport.


This Safety Guideline describes minimum criteria for documentation of decontamination and residual hazards associated with decontamination.


Referenced SEMI Standards

SEMI S2 — Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S16 — Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life

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