S01300 - SEMI S13 - 製造装置と共に使用することが意図された装置ユーザへの提供文書のための環境,健康,安全ガイドライン

Volume(s): Safety Guidelines
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Environmental Health & Safety Technical Committeeで技術的に承認されている。現版は20121220日,global Audits and Reviews Subcommitteeにて発行が承認された。20131月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は1998年発行。前版は20053月発行。









  • 目的
  • 範囲
  • 制限
  • 参照スタンダードおよび文書
  • 用語
  • 装置ユーザへの提供文書の一般的基準
  • 装置固有の危険性
  • 危険性エネルギーの制御手順
  • 危険警告
  • 作業固有の危険性
  • 材料安全データシート(MSDS: Material Safety Data Sheet
  • 個人防護具(PPE: Personal Protective Equipment
  • 装置点検,消耗部品,保守
  • トレーニングに関する要求事項
  • 緊急時の連絡先と対応


Referenced SEMI Standards

SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination
SEMI S14 — Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S16 — Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life
SEMI S26 — Environmental Health, and Safety Guideline for FPD Manufacturing System

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