SEMI S15 - 有毒及易燃氣體偵測系統評估之安全基準
有毒及易燃氣體偵測系統評估之安全基準 1. 目的 1.1 本基準係為說明在評估監視工廠人員、產品及原料、當地環境及社區安全之固定式氣體偵測系統時應考慮的事項。所提供之評估指南和參考基準適用於使用有毒及易燃氣體且以液態或氣態形式儲存的廠房與設備
This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. It was available at www.semi.org in June 2007. Originally published February 2000.
NOTICE: This document was balloted and approved for withdrawal in 2007.
This guideline provides considerations for the evaluation of fixed gas detection systems used to monitor for safety of plant personnel, product and materials, the local environment and community. It provides an evaluation guide and reference sources appropriate to facilities and equipment where toxic and flammable gases are used and stored in gaseous or liquid form.
Referenced SEMI Standards
SEMI E33 — Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility