SEMI S15 - Safety Guideline for the Evaluation of Toxic and Flammable Gas Detection Systems
This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. It was available at www.semi.org in June 2007. Originally published February 2000.
NOTICE: This document was balloted and approved for withdrawal in 2007.
This guideline provides considerations for the evaluation of fixed gas detection systems used to monitor for safety of plant personnel, product and materials, the local environment and community. It provides an evaluation guide and reference sources appropriate to facilities and equipment where toxic and flammable gases are used and stored in gaseous or liquid form.
Referenced SEMI Standards
SEMI E33 — Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility