SEMI S16 - Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life -

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Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI S16-0307 (Reapproved 0812) - Inactive



This Standard was technically approved by the Environmental, Health, & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at and in August 2012; originally published June 2000; previously published March 2007.


NOTICE: This Document was reapproved with minor editorial changes.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This Document provides design guides to minimize environmental impacts in consideration of end of life of semiconductor manufacturing equipment (SME) or its components.


This Guide addresses design considerations to minimize environmental impact of SME or component disposal at end of life.


This Guide addresses design considerations to encourage reuse or recycling of SME or its components.


This Guide contains the following items:

  • Purpose
  • Scope
  • Limitations
  • Referenced Standards and Documents
  • Terminology
  • General Concept
  • Material Selection
  • Identification for Reusability or Recyclability
  • Design for Reusability or Recyclability
  • Documents to be Prepared by the Equipment Supplier


Referenced SEMI Standards

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S12 — Guidelines for Equipment Decontamination
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment

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