S01700 - SEMI S17 - 無人搬運車(UTV)系統之安全基準

Volume(s): Safety Guidelines
Language: Chinese (Traditional
Type: Single Standards Download (.pdf)
Abstract

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.

注意:這個翻譯是一個參考版本。如果您在使用上,發現中文翻譯版本與英文原文版本產生任何差異或是不確定之處,請務必參考英文原文版本,並以英文原文版本為主,英文原文版本屬於正式和權威的版本。

 

本基準之目的在於提供無人搬運車(Unmanned Transport Vehicle, UTV)系統的安全考量。UTV係針對半導體工廠或平面顯示器(flat panel display, FPD)工廠或實驗室之物料自動化搬運所設計的系統。UTV包括地面行駛車輛(floor traveling vehicle, FTV)系統和空中行駛車輛(overhead traveling vehicle, OTV)系統。

範圍

本基準適用於無人搬運車及半導體工廠與平面顯示器工廠之無人搬運車系統。

 

本基準係在說明地面行駛和空中行駛的無人搬運車及無人搬運車系統。地面行駛車輛(FTV)包括自動導引車(AGV)系統和軌道導引車(RGV)系統,空中行駛車輛(OTV)包括高架式搬運車(overhead shuttle, OHS)系統與高架式起重搬運車(overhead hoist transport, OHT)系統。

1.1  

 

在評估系統是否符合本基準時,應考量UTV系統供應商提供的整套設備,包括軌道、控制盤、電源配電盤,OHT起重設備或OHS維修空間以及其他型式UTV所需之操作與維護設備。

 

本文件包含下列章節:

·    目的

·    範圍

·    限制條件

·    參考標準

·    詞彙

·    一般規定

·    手冊(Manuals)

·    建築物介面

·    人因工程/人體工學考量

·    地震防護

·    UTV危害區域之預防受傷設計

·    碰撞保護

·    緊急操作

·    手動操作

·    維護保養

·    與半導體或FPD製造設備的自動材料操作裝置的介面

·    Protection from Load held by UTV

·    危險指示

·    危險物質

·    相關文件


Referenced SEMI Standards

SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
SEMI S26 — Environmental, Health, and Safety Guideline for FPD Manufacturing System

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