SEMI S18 - 可燃性シリコン化合物の環境,健康,安全に関するガイドライン -

Member Price: $155.00
Non-Member Price: $203.00

Volume(s): Safety Guidelines
Language: Japanese
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI S18-0312 - Superseded



本安全ガイドラインは,global Environmental Health & Safety Technical Committeeで技術的に承認されている。現版は20111224日,global Audits and Reviews Subcommitteeにて発行が承認された。20123月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は200211月発行。


注意: 本文書は,2011年,全面的に書き換えられた。








Referenced SEMI Standards

SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F6 — Guide for Secondary Containment of Hazardous Gas Piping Systems
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S4 — Safety Guideline for the Separation of Chemical Cylinders Contained in Dispensing Cabinets
SEMI S5 — Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves
SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

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