SEMI S18 - 矽烷族氣體處理之安全衛生及環保基準

Volume(s): Safety Guidelines
Language: Chinese (Traditional
Type: Single Standards Download (.pdf)
Abstract

矽烷族氣體處理之安全衛生及環保基準 目的 本基準之目的係在設定矽烷族氣體處理的最低安全與衛生標準,並適用半導體或平面顯示器(FPD)的製造設備與設施

 

This guideline was technically approved by the global Environmental Health & Safety Committee and is the direct responsibility of the Japan Environmental Health & Safety Committee. Current edition approved by the Japan Regional Standards Committee on July 19, 2002. Initially available at www.semi.org September 2002; to be published November 2002.

 

This guideline is intended as a minimum set of safety and health criteria for silane family gases handling related to equipment and facilities used in semiconductor or Flat Panel Display (FPD) manufacturing.

 

Referenced SEMI Standards

SEMI F1 — Specification for Leak Integrity of High Purity Gas Piping Systems and Components
SEMI F4 — Specification for Pneumatically Actuated Cylinder Valves
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F6 — Guide for Secondary Containment of Hazardous Gas Piping Systems
SEMI F13 — Guide for Gas Source Control Equipment
SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures
SEMI F15 — Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S4 — Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets
SEMI S5 — Safety Guideline for Flow Limiting Devices
SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment
SEMI S13 — Safety Guideline for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

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