SEMI S20 - Safety Guideline for Identification and Documentation of Energy Isolation Devices for Hazardous Energy Control
This standard was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 29, 2008. It was available at www.semi.org in October 2008. Originally published March 2003.
NOTICE: This document was balloted and approved for withdrawal in 2008.
This guideline is intended to establish a method for the unique identification of Energy Isolation Devices (EID) used for lockout/tagout (LOTO). This identification is intended to occur both at the devices and at those places in the supplier-provided manuals where the devices are referenced in tasks or procedures. This document supplements the existing provisions in SEMI S2 (for Hazardous Energy Isolation) and SEMI S13 (for providing appropriate documentation) with a uniform graphical representation and identification system. This document also provides guidance for developing instructions for operating LOTO EIDs.
Referenced SEMI Standards
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S13 — Safety Guidelines for Operation and Maintenance Manuals Used With Semiconductor Manufacturing Equipment