SEMI S21 - 人員防護安全基準
人員防護安全基準 目的 本安全基準係為提供個人防護的相關建議，避免人員在半導體或FPD製造設備上或附近執行工作時發生安全衛生之危險
This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 24, 2006. It was available at www.semi.org in October 2006. Originally published October 2003.
E This standard was editorially modified in February 2007 to correct an error. Changes were made to ¶ 7.2.3.
This safety guideline identifies preferred methods for the protection of persons from safety and health hazards as they perform work on or around equipment used for semiconductor or FPD manufacturing.
Referenced SEMI Standards
SEMI F34 — Guide for Liquid Chemical Pipe Labeling
SEMI S2 — Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S13 — Safety Guideline for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment
SEMI S19 — Safety Guideline for Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel