SEMI S21 - 作業者保護のための安全ガイドライン -

Member Price: $155.00
Non-Member Price: $203.00

Volume(s): Safety Guidelines
Language: Japanese
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI S21-1106E (Reapproved 0612) - Superseded



本スタンダードは,global Environmental Health & Safety Technical Committeeで技術的に承認されている。現版は2012221日,global Audits and Reviews Subcommitteeにて発行が承認された。20126月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は200310月発行。前版は20072月発行。


注意: 本文書は,編集上の修正を伴い,再承認された。











1 目的

2 範囲

3 制限

4 参照スタンダードおよび文書

5 用語

6 作業者保護全般

7 化学薬品の危険

8 危険エネルギーの切離し

9 危険電圧ないしは危険電気エネルギーに対する活線作業

10 放射線,または電磁波,レーザー等を発生する装置

11 物理的危険

  1. 保護具

  2. 緊急事態への対策と異常事態の管理


Referenced SEMI Standards

SEMI F34 — Guide for Liquid Chemical Pipe Labeling
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment
SEMI S19 — Safety Guideline for Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel
SEMI S24 — Safety Guideline for Multi-Employer Work Areas

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