SEMI S21 - Safety Guideline for Worker Protection
This Safety Guideline was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 1, 2018. Available at www.semiviews.org and www.semi.org in August 2018; originally published October 2003; previously published June 2012.
This Safety Guideline identifies preferred methods for the protection of persons from safety and health hazards as they perform work on or around equipment used for semiconductor or FPD manufacturing.
This Safety Guideline describes methods for protection against hazards that workers may encounter in the work area, such as hazardous energies, physical hazards, or hazardous chemicals.
This Safety Guideline is intended to recommend considerations for protecting all persons that work on or around equipment used for semiconductor or FPD manufacturing.
This Safety Guideline applies to equipment suppliers and users of equipment, including activities related to semiconductor or FPD manufacturing, and equipment and process development activities.
Referenced SEMI Standards
SEMI F34 — Guide for Liquid Chemical Pipe Labeling
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment
SEMI S19 — Safety Guideline for Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel
SEMI S24 — Safety Guideline for Multi-Employer Work Areas