S02200 - SEMI S22 - 半導体製造装置の電気設計のための安全に関するガイドライン

SEMI S22 - 半導体製造装置の電気設計のための安全に関するガイドライン -

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Volume(s): Safety Guidelines
Language: Japanese
Type: Single Standards Download (.pdf)
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Revision: SEMI S22-0718E - Current

Revision

Abstract

 

本ガイドラインは，半導体産業で使用される生産装置の設計における電気的安全に関する考慮事項を提供する。

 

製品安全に関わる基本的懸案事項には，本文書に規定されている設計，製作，テストの原則を満たすか，または該当する電気的安全に関するスタンダードの要求条件を満たすことにより対処できる。

　

Referenced SEMI Standards

SEMI E33 — Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S3 — Safety Guidelines for Heated Chemical Baths
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S13 — Safety Guideline for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

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