SEMI S22 - 半導體製造設備電氣設計安全基準

Volume(s): Safety Guidelines
Language: Chinese (Traditional
Type: Single Standards Download (.pdf)

半導體製造設備電氣設計安全基準 目的 本基準係在針對半導體產業使用的生產設備提供以設計為主的整套電氣安全考量。 符合本文件規定之設計、建構與設計原則或其他可用的電氣安全標準需求,便可符合基本的產品安全考量.


This safety guideline was technically approved by the global Environmental Health and Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 24, 2006. It was available at in October 2006. Originally published November 2003; previously published July 2006.


NOTICE: Paragraphs entitled "NOTE" are not an official part of this document and are not intended to modify or supercede it. NOTICE: Conformance to the "should" provisions of this guideline is necessary to declare conformance to this document. Conformance to "may", "suggested", "preferred", "recommended", "NOTE", or "Related Information" provisions is not necessary to declare conformance.


NOTICE: This document contains material that has been balloted and approved by the SEMI Environmental Health and Safety Committee, but is not immediately effective. This material and the date on which it becomes effective are included in Delayed Revisions § 1. The provisions of this information are not an authoritative part of the document until their effective dates. The main body of SEMI S22 remains the authoritative version. Some or all of the provisions of revisions not yet in effect may optionally be applied prior to the effective date, providing they do not conflict with portions of the authoritative version other than those that are to be revised or replaced as part of the deferred change, and are labeled accordingly. Material that is to be replaced by revisions that are not yet in effect is preceded by a NOTICE indicating its status.


This guideline provides a set of design based electrical safety considerations for production equipment used in the semiconductor industry. Basic product safety concerns can be addressed by satisfying the design, construction, and testing principles set forth in this document or by satisfying the requirements of applicable electrical safety standards.


Referenced SEMI Standards

SEMI E33 — Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S3 — Safety Guidelines for Heated Chemical Baths
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S13 — Safety Guideline for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

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