SEMI S22 - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
NOTICE: Paragraphs entitled ‘NOTE:’ are not an official part of this Standard or Safety Guideline and are not intended to modify or supersede the official Standard or Safety Guideline. These have been supplied by the global technical committee to enhance the usage of the Standard or Safety Guideline.
NOTICE: Conformance to the ‘should’ provisions of this Safety Guideline is necessary to declare conformance to this Document. Conformance to ‘may,’ ‘suggested,’ ‘preferred,’ ‘recommended,’ ‘NOTE,’ or ‘Related Information’ provisions is not necessary to declare conformance.
This Safety Guideline provides a set of design based electrical safety considerations for production equipment used in the semiconductor industry.
Basic product safety concerns can be addressed by satisfying the design, construction, and testing principles set forth in this Document or by satisfying the requirements of applicable electrical safety standards.
This Safety Guideline applies to semiconductor manufacturing equipment.
Included in this Safety Guideline are design considerations for electrical safety interlocks that protect against electrical as well as nonelectrical safety hazards; and nonelectrical interlocks that protect against electrical safety hazards.
This Document applies to the electrical design for all equipment used to manufacture, measure, assemble, and test semiconductor products unless the equipment is specifically excluded. See § 3, Limitations.
This Safety Guideline applies to equipment intended to be powered by hazardous voltages or hazardous electrical power.
Referenced SEMI Standards
SEMI E33 — Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S3 — Safety Guidelines for Process Liquid Heating System
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment