SEMI S26 - Environmental, Health, and Safety Guideline for FPD Manufacturing System
This Standard was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 19, 2015. Available at www.semiviews.org and www.semi.org in May 2016; originally published March 2008; previously published April 2015.
NOTICE: Paragraphs entitled ‘NOTE’ are not an official part of this Safety Guideline and are not intended to modify or supersede the official Safety Guideline. These have been supplied by the committee to enhance the usage of the Safety Guideline.
This Safety Guideline is intended as a set of performance-based environmental, health and safety (EHS) considerations for FPD manufacturing system (FPDMS) including their subsystems.
Applicability — This Safety Guideline applies to FPDMS used to manufacture, measure, assemble, and test FPD products, and their subsystems.
Precedence of Sectional Requirements — In the case of conflict between provisions in different sections of this Safety Guideline, the section or subsection specifically addressing the technical issue takes precedence over the more general section or subsection.
Referenced SEMI Standards
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S3 — Safety Guideline for Process Liquid Heating System
SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment
SEMI S14 — Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S21 — Safety Guideline for Worker Protection
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment