S02700 - SEMI S27 - 環境,健康,安全(ESH)評価報告書の内容に関する安全ガイドライン

Volume(s): Safety Guidelines
Language: Japanese
Type: Single Standards Download (.pdf)

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.

免責事項: このSEMIスタンダードは,投票により作成された英語版が正式なものであり,日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます。


本安全ガイドラインは, Environmental Health & Safety Global Technical Committeeで技術的に承認されている。現版は2009年12月16日,global Audits and Reviews Subcommitteeにて発行が承認された。2010年2月にwww.semi.orgで入手可能となる。

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

本文書は,SEMI安全ガイドラインに対する製造装置 (ME) の評価を記録する評価報告書の一貫性をはかり,読みやすさを改善することを目的としている。


Referenced SEMI Standards

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guideline for Evaluation Personnel and Evaluating Company Qualifications
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $135.00
Regular price Non-Member Price: $180.00