SEMI S27 - 針對環境、安全與衛生(ESH)評估報告內容之安全指導方針

Volume(s): Safety Guidelines
Language: Chinese (Traditional
Type: Single Standards Download (.pdf)
Abstract

本安全指導方針由全球環境、衛生及安全技術委員會(Environmental Health & Safety Technical Committee)技術核可,本版於2009年12月16日由全球審核與覆檢小組委員會核可,自2010年2月起可以於www.semi.org取得。

 

本文件的目的在於改善依照SEMI安全指導方針評估製造設備(ME)的評估報告之一致性與可讀性。

 

本文適用於製造設備評估報告中,其對SEMI安全指導方針的兼容性。

 

Referenced SEMI Standards

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guideline for Evaluation Personnel and Evaluating Company Qualifications
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconduct

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