SEMI S27 - Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports
This Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 16, 2009. Available at www.semi.org in February 2010.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
The purpose of this Document is to improve the consistency and readability of evaluation reports documenting evaluations of manufacturing equipment (ME) to SEMI Safety Guidelines.
This Document applies to reports of evaluations of ME as to its conformance to SEMI Safety Guidelines.
Referenced SEMI Standards
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guideline for Evaluation Personnel and Evaluating Company Qualifications
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
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