S02800 - SEMI S28 - 半導体製造装置用ロボットおよびロードポートの安全ガイドライン

Volume(s): Safety Guidelines
Language: Japanese
Type: Single Standards Download (.pdf)

本安全ガイドラインは,global Environmental Health & Safety Committeeで技術的に承認されている。現版は2011912日,global Audits and Reviews Subcommitteeにて発行が承認された。201110月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。




本安全ガイドラインは,SEMI S2の一般的範囲を超えたロードポートおよびウェーハハンドリングロボットの製造業者に対して追加のガイダンスを提供する。










Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers

SEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)

SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E63 — Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface

SEMI E92 — Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-Interoperability Standard (BOLTS/Light)

SEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles

SEMI E117 — Specification for Reticle Load Port

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

SEMI S17 — Safety Guideline for Unmanned Transport Vehicle (UTV) Systems

SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

SEMI S26 — Environmental, Health, and Safety Guideline for FPD Manufacturing System

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