SEMI S28 - Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment
This Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www.semiviews.org and www.semi.org in October 2011.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Safety Guideline provides a set of performance and design based safety considerations for load ports and wafer handling robots that are intended to be integrated into semiconductor manufacturing equipment (SME). This Safety Guideline provides additional guidance to manufacturers of load ports and wafer handling robots beyond the general coverage of SEMI S2.
This Safety Guideline covers essential safety issues for load ports and wafer handling robots, intended for integration into SME, that might not be covered in other applicable safety guidelines and standards for industrial robots. This Safety Guideline provides guidance for the safety evaluation of load ports and wafer handling robots before integration. This Safety Guideline aids the designers of load ports and wafer handling robots in anticipating safety considerations that will arise during integration into SME.
This Safety Guideline guides suppliers of load ports and wafer handling robots concerning the document contents needed by integrators for safety evaluations of their completed SME systems. This Safety Guideline applies to atmospheric and vacuum wafer-handling robots that are manufactured with their supplier’s intention that they be integrated into semiconductor manufacturing equipment. This Safety Guideline applies to load ports that interface with front-opening unified pods (FOUP), standard mechanical interface (SMIF) pods, and cassettes and that are manufactured for integration into semiconductor manufacturing equipment.
This Safety Guideline includes safety considerations in addition to those of safety standards for industrial robots. This Safety Guideline applies to wafer handling robots and load ports that are being evaluated independently of SME. The documentation provisions of § 8 are to be applied to load ports and wafer handling robots sold after this safety guideline is published, regardless of design or development date.
Referenced SEMI Standards
SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E63 — Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
SEMI E92 — Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-Interoperability Standard (BOLTS/Light)
SEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles
SEMI E117 — Specification for Reticle Load Port
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S17 — Safety Guideline for Unmanned Transport Vehicle (UTV) Systems
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
SEMI S26 — Environmental, Health, and Safety Guideline for FPD Manufacturing System