SEMI S29 - Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www.semiviews.org and www.semi.org in July 2012.

 

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

This Document provides guidance to characterize fluorinated greenhouse gas (F-GHG) emitted from manufacturing equipment (ME).

 

This Document provides guidance to characterize F-GHG destruction or removal efficiency (DRE) of an abatement tool.

 

This Document also addresses continuous improvement planning for emission reduction on ME or an abatement tool.

 

Greenhouse gases (GHGs) to which this Guide applies are CF4, C2F6, C3F8, c-C4F8, CHF3, SF6 and NF3.

 

This Guide applies to F-GHG emission characterization from ME.

 

This Guide applies to F-GHG emission characterization from an abatement tool.

 

This Guide applies to characterization of consumption, residues, byproducts or recombination of F-GHG through chemical reaction in ME.

 

This Guide is applicable to abatement tool specification for F-GHG DRE.

 

It is recommended to use this Guide in semiconductor, TFT-LCD, photovoltaic industries at least.

 

This Guide contains the following sections:

  • Purpose
  • Scope
  • Limitations
  • Referenced Standards and Documents
  • Terminology
  • General Provisions
  • Baseline Recipe(s)
  • Measurement Instruments
  • Measurement and Characterization of F-GHG Emission
  • Timing and Frequency of F-GHG Emission Characterization
  • Reporting
  • Record Keeping of Data Characterized
  • Roadmap and Continuous Improvement

 

Referenced SEMI Standards

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S23 — Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment

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