SEMI S30 - Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes -

Abstract

1  Purpose
1.1  This Safety Guideline is intended as a minimum set of safety criteria for the procurement, storage, handling, and use of energetic materials in semiconductor research and development (R&D) and manufacturing processes in all phases of use, from process chemical supply through abatement.
1.2  This Safety Guideline is intended to be industry best practices as of its publication date.
2  Scope
2.1  The scope of this Safety Guideline is energetic materials, as defined in ¶ 5.2.19 and the equipment which contains them.
2.2  This Safety Guideline specifies the testing and criteria for determining whether a material is an ‘energetic material’ in the context of this Safety Guideline.
2.3  This Safety Guideline also describes the minimum characterization data to be provided in research and development, pilot-line, or high-volume semiconductor manufacturing equipment.
2.4  This Safety Guideline provides safety design criteria for process chemical supply, process, and post-process equipment for semiconductor processes using energetic materials.
2.5  This Safety Guideline provides industry-specific criteria, and refers to some of the many international codes, regulations, standards, and specifications that should be considered when designing semiconductor manufacturing equipment.

Referenced SEMI Standards (purchase separately)
SEMI F66 — Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals
SEMI F96 — Specification for Port Configuration on Canisters to Contain Liquid CVD Precursors
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S3 — Safety Guideline for Process Liquid Heating Systems
SEMI S6 — Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guideline for Evaluation of Personnel and Evaluating Company Qualifications
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Environmental, Health, and Safety Guideline for Manufacturing Equipment Decontamination
SEMI S13 — Environmental, Health, and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S18 — Environmental, Health, and Safety Guideline for Flammable Silicon Compounds

Revision History
SEMI S30-0824 (delayed revision implementation)
SEMI S30-1023a (delayed revision)
SEMI S30-1023 (technical revision)
SEMI S30-0719E (editorial revision)
SEMI S30-0719 (first published)

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