Semiconductor Metrology Instruments

Course Description

The THORS Semiconductor Metrology Instruments course introduces the learners to the various instruments used in semiconductor testing. This course focuses on wafer inspection instruments used in semiconductor testing. This course focuses on wafer inspection systems, which are used for identifying defects, and process control metrology instruments, which are used for measuring various aspects of semiconductor manufacturing processes. Presented in THORS' highly visual and interactive learning format, this course will equip the learner with a foundational knowledge of semiconductor metrology. 

Learning Objectives

• Identify the different wafer inspection systems and their optical and charged particle sources.

•  Recognize some of the commonly used instruments in destructive techniques and their applications. 

•  Recognize some of the commonly used instruments in nondestructive techniques and their applications.

• Describe the instruments and techniques used in process control metrology for the different deposited films and intricate pattern designs.

•Explain the measurement techniques used for topography and physical dimension measurement.

•Distinguish between the various techniques for analyzing material composition.

•Understand the instruments used in material property measurements.

Course Duration 

1.5 hours

Target Audience

Quality, manufacturing, engineering, designing, testing, purchasing, and sales functions at organizations that require a comprehensive understanding of the processes involved in semiconductor metrology, from defect inspection to semiconductor process metrology.