SEMI T4 - Specification for 150 mm and 200 mm Pod Identification Dimensions
The purpose of this Specification is to ensure dimensional compatibility when mounting pod identification tags and tag identification devices.
The scope of this Specification is to define:
- free space at a pod to allow the mounting of a pod identification tag, and
- free space to allow data transmission.
This Specification is applicable to 150 mm and 200 mm Standard Mechanical Interfaces (SEMI E19). The space required for pod handling per SEMI E47 is considered.
Referenced SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E19 — Specification for Standard Mechanical Interface (SMIF)
SEMI E47 — Specification for 150 mm/200 mm Pod Handles
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