SEMI T5 - Specification for Alphanumeric Marking of Round Compound Semiconductor Wafers
This Standard was technically approved by the Traceability Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25, 2014. Available at www.semiviews.org and www.semi.org in December 2014; originally published in 1996; previously published November 2011.
The purpose of this Document is to define standard criteria for the alphanumeric marking of round compound semiconductor wafers, in order to improve the consistency of wafer marking and allow simplification of the performance requirement of automatic optical character recognition (OCR) equipment.
This Specification defines the geometric and spatial limits of the alphanumeric code, specifically for nominally round, flatted or notched compound semiconductor wafers. It also defines the basic code used to characterize the individual wafer, thereby providing practical operator interpretation. This Document does not address the marking techniques that may be employed when complying with this standard nor does it address any health issues associated with those techniques.
Referenced SEMI Standards
SEMI M12 — Specification for Serial Alphanumeric Marking of the Front Surface of Wafers