SEMI T8 - Specification for Marking of Glass Flat Panel Display Substrates with a Two-Dimensional Matrix Code Symbol
This Standard was technically approved by the Traceability Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 4, 2015. Available at www.semiviews.org and www.semi.org in February 2016; originally published June 1998; previously published November 2010.
NOTICE: This Document was reapproved with minor editorial changes.
This Specification is intended to provide a marking symbology that can be used to mark glass flat panel display (FPD) substrates within the fixed quality area (FQA) of the edge exclusion area of the substrate.
This Specification defines the geometric and spatial relationships and content (including the error checking and correcting code) of rectangular two-dimensional (2-D), machine-readable, binary Data Matrix symbology for front-surface or back-surface marking of glass FPD substrates (sometimes called ‘motherglass’ substrates) which comply with the edge specifications of SEMI D12. It may be used in conjunction with the alphanumeric marking codes specified in SEMI M12 and SEMI M13.
Although this Specification does not specify the marking techniques that may be employed when complying with its requirements, it is assumed that the symbol will be obtained by laser scribing individual dots. A survivability experiment executed by the United States Display Consortium found such marks suitable.
Data Matrix symbology is applicable to a broad range of FPD products including virgin substrates, processed and patterned substrates, panel assemblies, and displays. An application note describes the application of Data Matrix symbology to individual panel sections contained within a multi-panel motherglass substrate. The format and algorithms of this code are based on two-dimensional symbology specified in ISO/IEC 16022.
Referenced SEMI Standards
SEMI D12 — Specification for Edge Condition of Flat Panel Display (FPD) Substrates
SEMI M12 — Specification for Serial Alphanumeric Marking of the Front Surface of Wafers
SEMI M13 — Specification for Alphanumeric Marking of Silicon Wafers