T01300 - SEMI T13 - Specification for Device Tracking: Concepts, Behavior, and Services

Volume(s): Traceability
Language: English
Type: Single Standards Download (.pdf)

This standard was technically approved by the global Traceability Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www.semi.org in June 2010. Originally published June 2004; previously published November 2004.


The purpose of this specification is to trace devices for the sake of quality control, warranty, security or any other reasons. This specification makes it easy to transfer information required for realizing tracing in such semiconductor products as dice and packaged devices. Because modern market trend of consumer minds, industries and governments are explicitly or implicitly requiring traceability for all products including semiconductor devices. Implementing this specification will help to satisfy both direct and indirect consumers of semiconductor devices. The other purpose of this document is to clarify means to define coordinates to specify physical position of devices on substrates which the other standard documents don’t address. This information is provided in Appendix sections.


Subordinate Standards:

SEMI T13.1-1104 (Reapproved 0710) - Specification for SECS Protocol for Device Tracking

SEMI T13.2-1104 (Reapproved 0710) - Specification for XML Protocol for Device Tracking


Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)
SEMI E39 — Object Service Standard: Concepts, Behavior and Services
SEMI E130 — Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
SEMI G81 — Specification for Map Data Items
SEMI G84 — Specification for Strip Map Protocol
SEMI G85 — Specification for Map Data Format
SEMI M17 — Guide for Universal Wafer Grid
SEMI M20 — Practice for Establishing a Wafer Coordinate System
SEMI M21 — Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array

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