SEMI T18 - Specification of Parts and Components Traceability -

Abstract

The purpose of this Document is to provide standard means to collect and manage data to estimate lifetime or remaining time before such maintenance as calibration, cleaning and replacement more accurately.

The final goal of the Standard is to realize the traceability of semiconductor, flat panel display (FPD), or MEMS devices with tracing parts and/or components of their manufacturing equipment, including jigs and some consumable materials.

This Document specifies fundamental functions and messaging capabilities on equipment and its supervising systems, based on SEMI T12 (Specification for Tracing Jigs and Implements) with some extension.

This Document doesn’t specify the methodology or algorithm to estimate or foretell the lifetime of parts and components. The components here include such consumable materials as sputtering gun with target material and repeatedly used chemicals in bath or container.

Referenced SEMI Standards
 

SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)
SEMI T12 — Specification for Tracing Jigs and Implements

 

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