The Evolving Paths for Waste in Semiconductor Manufacturing

This report was developed to support the adoption of circular design principles and resource recovery practices across the semiconductor manufacturing value chain. This report streamlines discovery, accelerates adoption, and creates greater visibility into how peers are advancing circularity.

It is a consolidation of publicly available knowledge on best-known methods for recovering and recycling spent chemicals, wastewater treatment by-products, tool packaging, and other manufacturing wastes generated by integrated device manufacturers (IDMs), foundries, outsourced semiconductor assembly and test (OSAT) facilities.  The review also draws on corporate sustainability reports, waste treatment technology publications, and industry data compiled by SEMI, complemented by professional experience in chemical waste management in the EU and USA. equipment manufacturers, and material suppliers.

The report identifies existing technological, regulatory, and  economic enablers for material recovery, as well as barriers in legacy facility design. The primary recommendation is to accelerate adoption of proven circular solutions by improving visibility of peer practices, aligning regulatory strategies, and strengthening return-on-investment (ROI) assessments to support informed decision-making.