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SEMI E44 - Guide for Procurment and Acceptance of Minienvironments
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F21 - 清浄な環境における空気を媒体とする分子汚染レベルの分類
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E45 - Test Method for the Determination of Inorganic Contamination from Minienvironments Using VPD-TXRF, VPD-AAS, or VPD/ICP-MS
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E46 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS)
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E46 - イオン移動度分光計（IMS）を使用したミニエンバイロメントからの有機汚染分析の試験方法
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E45 - 気相分解－全反射X線分光法 (VPD/TXRF)，気相分解－原子吸収分光法(VPD/AAS)，気相分解－誘導結合プラズマ質量分光法 (VPD/ICP-MS) を使用したミニエンバイロメントからの無機汚染分析のための試験方法
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E108 - Test Method for the Assessment of Outgassing Organic Contamination from Minienvironments Using Gas Chromatography/Mass Spectroscopy
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI F21 - Classification of Airborne Molecular Contaminant Levels in Clean Environments
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00
SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様
Sale priceMember Price: $171.00
Non-Member Price: $224.00
Non-Member Price: $224.00
SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles
Sale priceMember Price: $144.00
Non-Member Price: $187.00
Non-Member Price: $187.00