Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI M9 - Specification for Polished Monocrystalline Gallium Arsenide Wafers
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SEMI M10 - Terminology for Identification of Structures and Features Seen on Gallium Arsenide Wafers
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SEMI M12 - Specification for Serial Alphanumeric Marking of Silicon Wafers
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SEMI M13 - Specification for Alphanumeric Marking of Silicon Wafers
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SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals
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SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers
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SEMI M16 - Specification for Polycrystalline Silicon
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SEMI M17 - Guide for a Universal Wafer Grid
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SEMI M18 - Format for Silicon Wafer Specification Form for Order Entry
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SEMI M19 - Specification for Electrical Properties of Bulk Gallium Arsenide Single Crystal Substrates
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SEMI M20 - Practice for Establishing a Wafer Coordinate System
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SEMI M21 - Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array
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SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers
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SEMI M23 - Specification for Polished Monocrystalline Indium Phosphide Wafers
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SEMI M24 - Specification for Polished Monocrystalline Silicon Premium Wafers
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Recently Published Standards
SEMI 3D24 - Guide for Peel Testing of Redistribution Layers and Other Traces Used Within Advanced Packages and Structures
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SEMI E200 - Specification for Large JEDEC™ Tray Stack Load Port
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Non-Member Price: $193.00
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SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
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SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
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