SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.

HB01100 - SEMI HB11 - Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED Wafers
HB01200 - SEMI HB12 - Specification for Dry-Etched Patterned Sapphire Substrates (DPSS)
SEMI HB12 - Specification for Dry-Etched Patterned Sapphire Substrates (DPSS) Sale priceMember Price: $144.00
Non-Member Price: $187.00
HB01300 - SEMI HB13 - Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface
HB01400 - SEMI HB14 - Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire Substrate
M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers
SEMI M1 - Specification for Polished Single Crystal Silicon Wafers Sale priceMember Price: $278.00
Non-Member Price: $369.00
M00600 - SEMI M6 - Specification for Silicon Wafers for Use as Photovoltaic Solar Cells
SEMI M6 - Specification for Silicon Wafers for Use as Photovoltaic Solar Cells Sale priceMember Price: $144.00
Non-Member Price: $187.00
M00800 - SEMI M8 - Specification for Polished Monocrystalline Silicon Test Wafers
SEMI M8 - Specification for Polished Monocrystalline Silicon Test Wafers Sale priceMember Price: $144.00
Non-Member Price: $187.00
M00900 - SEMI M9 - Specification for Polished Monocrystalline Gallium Arsenide Wafers
SEMI M9 - Specification for Polished Monocrystalline Gallium Arsenide Wafers Sale priceMember Price: $144.00
Non-Member Price: $187.00
M01000 - SEMI M10 - Terminology for Identification of Structures and Features Seen on Gallium Arsenide Wafers
M01200 - SEMI M12 - Specification for Serial Alphanumeric Marking of Silicon Wafers
SEMI M12 - Specification for Serial Alphanumeric Marking of Silicon Wafers Sale priceMember Price: $144.00
Non-Member Price: $187.00
M01300 - SEMI M13 - Specification for Alphanumeric Marking of Silicon Wafers
SEMI M13 - Specification for Alphanumeric Marking of Silicon Wafers Sale priceMember Price: $144.00
Non-Member Price: $187.00
M01400 - SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals
M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers
M01600 - SEMI M16 - Specification for Polycrystalline Silicon
SEMI M16 - Specification for Polycrystalline Silicon Sale priceMember Price: $144.00
Non-Member Price: $187.00
M01700 - SEMI M17 - Guide for a Universal Wafer Grid
SEMI M17 - Guide for a Universal Wafer Grid Sale priceMember Price: $144.00
Non-Member Price: $187.00
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SEMIViews

Easy Web Access to SEMI International Standards and Safety Guidelines. SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,000 Standards at your convenience. Learn More