Individual SEMI Standards
Individual SEMI Standards are available for immediate download. You may view the abstract of the Standard before purchasing. Downloadable Standards are priced at $180 USD and $355 USD each; SEMI Members receive a 25% discount. SEMI Standards currently use PDF file format, which requires Adobe Acrobat Reader for viewing. Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.
SEMI HB3 - Specification for the Mechanical Interface for 150 mm HB-LED Load Port
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Non-Member Price: $193.00
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SEMI HB4 - Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI)
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI HB5 - Test Method for Measurement of Saw Marks on Crystalline Sapphire Wafers by Using Optical Probes
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI HB6 - Test Method for Measurement of Thickness and Shape of Crystalline Sapphire Wafers by Using Optical Probes
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Non-Member Price: $193.00
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SEMI HB7 - Test Method for Measurement of Waviness of Crystalline Sapphire Wafers by Using Optical Probes
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI HB8 - Test Method for Determining Orientation of a Sapphire Single Crystal
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SEMI HB9 - Test Method and Acceptance Criteria for Visual Inspection of Surface Defects of GaN Epitaxial Wafers Used for Manufacturing HB-LED
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI HB10 - Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB-LED Wafers
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Non-Member Price: $193.00
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SEMI HB11 - Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED Wafers
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Non-Member Price: $193.00
SEMI HB12 - Specification for Dry-Etched Patterned Sapphire Substrates (DPSS)
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SEMI HB13 - Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface
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SEMI HB14 - Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire Substrate
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SEMI M1 - Specification for Polished Single Crystal Silicon Wafers
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Non-Member Price: $380.00
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SEMI M6 - Specification for Silicon Wafers for Use as Photovoltaic Solar Cells
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Non-Member Price: $193.00
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SEMI M8 - Specification for Polished Monocrystalline Silicon Test Wafers
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Recently Published Standards
SEMI 3D24 - Guide for Peel Testing of Redistribution Layers and Other Traces Used Within Advanced Packages and Structures
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Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E200 - Specification for Large JEDEC™ Tray Stack Load Port
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI FH5 - Guide for Reliability of Flexible Hybrid Electronics
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water
Sale priceMember Price: $148.00
Non-Member Price: $193.00
Non-Member Price: $193.00
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